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・ Ethylene diurea
・ Ethylene glycol
・ Ethylene glycol (data page)
・ Ethylene glycol dimethacrylate
・ Ethylene glycol dinitrate
・ Ethylene glycol poisoning
・ Ethylene oxide
・ Ethylene propylene rubber
・ Ethylene thiourea
・ Ethylene vinyl alcohol
・ Ethylene-forming enzyme
・ Ethylene-responsive element binding protein
・ Ethylene-vinyl acetate
・ Ethylenediamine
・ Ethylenediamine dihydroiodide
Ethylenediamine pyrocatechol
・ Ethylenediaminetetraacetic acid
・ Ethylenedioxy
・ Ethylenetetracarboxylic acid
・ Ethylenetetracarboxylic dianhydride
・ Ethylestrenol
・ Ethylferrocene
・ Ethylhexyl palmitate
・ Ethylhexyl triazone
・ Ethylhexylglycerin
・ Ethylic
・ Ethylidene diacetate
・ Ethylin Wang Jabs
・ Ethyline
・ Ethylisopropyltryptamine


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Ethylenediamine pyrocatechol : ウィキペディア英語版
Ethylenediamine pyrocatechol

Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon. A typical formulation consists of ethylenediamine, pyrocatechol, pyrazine and water. It is carcinogenic and very corrosive. It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.
==References==

*(Microfabrication:Wet-Etching ), University of Washington, College of Engineering


抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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